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Residue-gas analyzers for cleanliness verification

| By Gerald Ondrey

tải 68 game bàiLiên kết đăng nhậpOmniGrade (photo) is a residual-gas analysis (RGA) system that is designed to meet specific testing demands. OmniGrade configurations include two or three chambers: the spectrometer chamber in which the mass spectrometer is positioned, and a measurement chamber where the samples are placed during measurement. Options include a load lock chamber to minimize system background and an automated sample transport system. Cleanroom compatibility is possible. The mass spectrometer can be selected according to the application (PrismaPro or HiQuad). Thermal heating, either of the pure system or together with the sample (bake-out), will further optimize the measuring capability and improve sample cleanliness. — Pfeiffer Vacuum GmbH, Asslar, Germany

 

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